Control of a Five-Degrees-of-Freedom Nanopositioner
نویسندگان
چکیده
Department of Automation Engineering, National Formosa University Huwei, Yunlin, Taiwan, (Email: [email protected]) *Department of Electrical Engineering, National Winlin University of Science and Technology Douliou, Yunlin, Taiwan **Institute of Electro-Optical and Material Science, National Formosa University Huwei,Yunlin, Taiwan ***Institute of Mechanical Engineering, National Cheng Kung University Tainan, Taiwan ****Institute of Mechanical and Electro-Mechanical Engineering, National Formosa University Huwei, Yunlin, Taiwan
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